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TECHNOLOGY > Preparation of SEM samples for RIE

Preparation of SEM samples for RIE

  • Reactive ion etching machine
Beijing Sanhelian Technology Co., Ltd. is a manufacturer specializing in the research and production of domestic reactive ion etching machines. Beijing Sanhelian ("SHL") is an excellent product of reactive ion etching machines in China. In the field of failure analysis equipment, Sanhelian has unique experience and technology. Welcome to the official website of Beijing Sanhelian a domestic manufacturer of failure analysis equipment, to learn more about domestic brands of failure analysis equipment.

失效分析及反向拍照中,受限于光学显微镜放大倍率,需要SEM观察。由于氧化硅厚度会出现穿透能力差及荷电效应,该效应会导致扫描电镜图像畸变、信号漂移、反向中看不清图形等。

反应离子刻蚀机在通入氩气和HCF3,低功率刻蚀能保证很好的垂直性且留住通孔用于观察和反向拍照。

国产反应离子刻蚀机研发厂商国产失效分析设备厂商